Thermal stability study of gallium nitride based magnetic field sensor

Abstract

We investigated the thermal stability and performance of AlGaN/AlN/GaN Hall-effect sensors under industry-relevant atmospheric conditions. The thermal stability and performance of Hall sensors are evaluated by monitoring Hall sensitivity, two-dimensional electron gas density, and Ohmic contact resistance during aging at 200 °C for up to 2800 h under atmospheric conditions. This was accomplished by characterizing AlGaN/AlN/GaN micro-Hall sensors, with and without contacts, and before and after being placed under different thermal aging times. Observed electrical performance was correlated with the micro-structural evolution of AlGaN/AlN/GaN Hall sensor heterostructures. Results indicate that the AlGaN/AlN/GaN Hall sensor provides stable performance for as long as 2800 h aging at 200 °C without any significant degradation of (i) Hall sensitivity, (ii) two-dimensional electron gas, and (iii) Ohmic contacts. However, there was a small change in sheet density and mobility, which is due to a decrease in polarization, resulting from local inhomogeneous strain relief at the barrier layer. During the early stage of thermal aging, a decrease in contact resistance was also observed and attributed to (i) out-diffusion of “Ga” at the vicinity of the contact interface, and (ii) a reduction in oxygen concentration and formation of Al–Ti intermediate alloy at the GaN/Ti interface, resulting in a reduced barrier and enhanced electron transport at the contacts. However, despite these small changes, results indicate that the AlGaN/AlN/GaN Hall sensor provides stable performance for as long as 2800 h thermal aging at 200 °C.