Oblique patterned etching of vertical silicon sidewalls
Author:
Affiliation:
1. Sandia National Laboratories, P.O. Box 5800, Albuquerque, New Mexico 87185, USA
Funder
Laboratory Directed Research and Development (LDRD)
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/am-pdf/10.1063/1.4945681
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