1. School of Electrical and Electronic Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798, Singapore
2. School of Electrical Engineering and Computer Science, Gwangju Institute of Science and Technology, Gwangju 61005, Republic of Korea
3. Department of Engineering Physics, École Polytechnique de Montréal, C.P. 6079, Succ. Centre-Ville, Montréal, Québec H3C 3A7, Canada
4. School of Electronic and Electrical Engineering, University of Leeds, Leeds LS2 9JT, United Kingdom
5. Applied Materials, Inc., Sunnyvale, California 95054-3299, USA