Density of CH3 radicals and the ionic composition in a low pressure methane plasma beam
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.368990
Reference14 articles.
1. Textured diamond growth on (100) β‐SiC via microwave plasma chemical vapor deposition
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4. Diamond Epitaxial Growth by Gas-Source Molecular Beam Epitaxy with Pure Methane
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3. Low-Pressure DC Air Plasmas. Investigation of Neutral and Ion Chemistry;The Journal of Physical Chemistry A;2005-06-28
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