Effect of adhesion on dynamic and static friction in surface micromachining
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1691198
Reference8 articles.
1. Molecular Level Friction As Revealed with a Novel Scanning Probe
2. Friction Characteristics and Adhesion Force Under Low Normal Load
3. Static friction in elastic adhesion contacts in MEMS
4. Vapor deposition of amino-functionalized self-assembled monolayers on MEMS
5. Viscous damping model for laterally oscillating microstructures
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