Dual-function circular polarization converter for microwave/plasma processing systems
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1149619
Reference15 articles.
1. Penetration of a strong electromagnetic wave in an inhomogeneous plasma generated by ECR using a magnetic beach
2. Measurement of Power Transfer Efficiency from Microwave Field to Plasma under ECR Condition
3. Electron cyclotron resonance plasma stream source for plasma enhanced chemical vapor deposition
4. Optimized microwave coupling in an electron cyclotron resonance etch tool
5. 2.45 GHz microwave plasmas at magnetic fields below ECR
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