Transition from multiple to single microcontact conduction during hot switching of microelectromechanical switches with ball-shaped dimples
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2352041
Reference11 articles.
1. RF MEMS
2. RF MEMS and NEMS technology, devices, and applications
3. Contact physics modeling and optimization design of RF-MEMS cantilever switches
4. Lifetime characteristics of ohmic MEMS switches
5. Effect of nanoscale heating on electrical transport in RF MEMS switch contacts
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3. Lifetime testing of a MEMS switch with Pt-Pt contact;Journal of Physics: Conference Series;2018-12
4. A Low Contact Resistance 4-Terminal Mems Relay: Theoretical Analysis, Design, and Demonstration;Journal of Microelectromechanical Systems;2018-06
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