1. School of Microelectronics, Shanghai University 1 , 20 Chengzhong Road, Shanghai 201800, China
2. Shanghai Key Laboratory of Superconductor Integrated Circuit Technologies 2 , 865 Changning Road, Shanghai 200050, China
3. National Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences 3 , 865 Changning Road, Shanghai 200050, China
4. Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences 4 , Beijing 100049, China
5. Beijing National Laboratory for Condensed Matter Physics and Institute of Physics, Chinese Academy of Sciences 5 , Beijing 100190, China
6. Songshan Lake Materials Laboratory 6 , Dongguan, Guangdong, China
7. School of Physical Sciences, University of Chinese Academy of Sciences 7 , Beijing 100049, China