1. Hebei Key Lab of Optic-Electronic Information and Materials, National and Local Joint Engineering Research Center of Metrology Instrument and System, Hebei University, Baoding 071002, China
2. State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China
3. College of Instrumentation and Electrical Engineering, Jilin University, Changchun 130061, China