1. Institute of Micro/Nano Electromechanical System and Integrated Circuit, College of Mechanical Engineering, State Key Laboratory for Modification of Chemical Fibers and Polymer Materials, Donghua University 1 , Shanghai, China
2. Jingwei Textile Machinery Co., Ltd. 2 , Beijing, China
3. Institute of Micro/Nano Electromechanical System and Integrated Circuit, College of Mechanical Engineering, Donghua University 3 , Shanghai, China