Activation energy and spectroscopy of the growth of germanium films by ultraviolet laser‐assisted chemical vapor deposition
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.335232
Reference19 articles.
1. A review of laser–microchemical processing
2. Low‐temperature growth of polycrystalline Si and Ge films by ultraviolet laser photodissociation of silane and germane
3. Products of the Vacuum‐Ultraviolet Photolysis of Germane Isolated in an Argon Matrix
4. Products of the Vacuum‐Ultraviolet Photolysis of Germane Isolated in an Argon Matrix
5. Silane pyrolysis
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