Ab initio and kinetic calculations for the reactions of Cl with SiHnCl4−n (n=1,2,3,4)
Author:
Publisher
AIP Publishing
Subject
Physical and Theoretical Chemistry,General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1788651
Reference31 articles.
1. Analysis and Modeling of Low Pressure CVD of Silicon Nitride from a Silane‐Ammonia Mixture: II. Deposition Modeling
2. Reaction of H atoms with some silanes and disilanes. Rate constants and Arrhenius parameters
3. A selection rule in SiHn(n=1–4)+F reactions: An ab initio molecular orbital study
4. Kinetic studies of the reactions of atomic chlorine and bromine with silane
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