A versatile microwave plasma source and its application for a CO2 laser
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Published:1994-09
Issue:9
Volume:65
Page:2980-2983
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ISSN:0034-6748
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Container-title:Review of Scientific Instruments
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language:en
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Short-container-title:Review of Scientific Instruments
Author:
März M.,Oestreicher W.
Cited by
4 articles.
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