Optimization of acoustic coupling for bottom actuated scattering based subsurface scanning probe microscopy

Author:

van Neer P. L. M. J.12,Quesson B.1,van Es M. H.3ORCID,van Riel M.3,Hatakeyama K.3,Mohtashami A.3,Piras D.3,Duivenoorde T.3,Lans M.3,Sadeghian H.45ORCID

Affiliation:

1. Department of Acoustics and Sonar, The Netherlands Organization for Applied Scientific Research (TNO), The Hague, Zuid-Holland 2597 AK, The Netherlands

2. Acoustical Wavefield Imaging, ImPhys, Delft University of Technology, Delft, Zuid-Holland 2628 CJ, The Netherlands

3. Department of Optomechatronics, The Netherlands Organization for Applied Scientific Research (TNO), Delft, Zuid-Holland 2628 CK, The Netherlands

4. Nearfield Instruments B.V., Rotterdam, Zuid-Holland, 3047 AT, The Netherlands

5. Department of Mechanical Engineering, Eindhoven University of Technology, Eindhoven, Noord-Brabant 5612 AZ, The Netherlands

Publisher

AIP Publishing

Subject

Instrumentation

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