Tracing the plasma interactions for pulsed reactive crossed-beam laser ablation
Author:
Affiliation:
1. General Energy Research Department, Paul Scherrer Institute, CH-5232 Villigen PSI, Switzerland
2. Ion Beam Physics, ETH Zurich, CH-8093 Zurich, Switzerland
Funder
Swiss National Science Foundation
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4934553
Reference23 articles.
1. Pulsed laser vaporization and deposition
2. Reactive crossed beam scattering of a Ti plasma and a N2 pulse in a novel laser ablation method
3. Parallel epitaxy of TiN(100) thin films on Si(100) produced by pulsed reactive crossed-beam laser ablation
4. Kinetic, crystallographic, and optical studies of GaN and AlxGa1−xN thin films grown on Si(111) by pulsed reactive crossed-beam laser ablation using liquid alloys and N2 or NH3
5. Design and synthesis of novel thin films and structures by reactive crossed-beam laser ablation
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