Thyristor stack for pulsed inductive plasma generation
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3095686
Reference9 articles.
1. Pulsed Low Frequency Inductively Coupled Plasma Generator and Applications
2. Stopping of Heavy Ions in a Hydrogen Plasma
3. Proceedings of the 4th Patras Workshop on Axions, WIMPs, and WISPs;Jacoby J.,2008
4. Principles of Plasma Discharges and Materials Processing
5. Review of inductively coupled plasmas for plasma processing
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