MEMS based bimorph optical temperature sensor

Abstract

The paper proposes a novel microcantilever based optical temperature sensor/calorimeter for use in applications requiring high-resolution measurements. The cantilever beam is made of bi-material that deflects in response to the change in temperature because of the difference that exists between the thermal expansion coefficients of the respective two materials. The deflection of the cantilever is then detected by an equivalent change in the optical intensity received by an optical setup. Analyses of the sensitivity have been carried out for different materials for the bimorph. The proposed sensor demonstrates a resolution of 110 nK as a temperature sensor and 0.5 pW as a calorimeter at [Formula: see text] error for Al/SiO2 bimorph. Such a high sensitivity in the said context has never been reported earlier.