1. Faculty of Fundamental Problems of Technology, Wrocław University of Science and Technology, Wybrzeże Wyspiańskiego 27, 50-370 Wrocław, Poland
2. Institut für Halbleitertechnik and Laboratory for Emerging Nanometrology, Technische Universität Braunschweig, 38092 Braunschweig, Germany
3. Epitaxy Competence Center ec2, Hans-Sommer-Straße 66, 38106 Braunschweig, Germany