Film stress of sputtered W/C multilayers and strain relaxation upon annealing
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.356390
Reference21 articles.
1. Structural stability of heat‐treated W/C and W/B4C multilayers
2. Tungsten‐carbon multilayer composition and the effects of annealing: A glancing angle extended x‐ray absorption fine structure study
3. High Resolution Electron Microscopy Study of As-Prepared and Annealed Tungsten-Carbon Nultilayers
4. Thermal evolution of X/C multilayers (with X=W, Ni, or SiWSi): A systematic study
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