New method for in situ control of Bragg reflector fabrication
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.115849
Reference8 articles.
Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Investigation of the densification mechanisms and corrosion resistance of amorphous silica films;Journal of Non-Crystalline Solids;2019-07
2. Development of a kinetic model for the moderate temperature chemical vapor deposition of SiO2 films from tetraethyl orthosilicate and oxygen;AIChE Journal;2018-07-25
3. Direct numerical inversion method for kinetic ellipsometric data I Presentation of the method and numerical evaluation;Applied Optics;2002-08-01
4. Ellipsometric method for real time control of thin film deposition on imperfect substrates;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2002-05
5. Adapted wavelength methods for in situ ellipsometry;Thin Solid Films;1998-02
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