1. Department of Engineering, Brandenburg University of Applied Science, 14470 Brandenburg an derHavel, Germany
2. Packaging Group, Institute of Micro- and Sensorsytems, Otto-von-Guericke University, Universitätsplatz 2, 39106 Magdeburg, Germany
3. Chair of Micorsystem Technology, Institute of Micro- and Sensorsytems, Otto-von-Guericke University, Universitätsplatz 2, 39106 Magdeburg, Germany