Laser annealing of SrTiO3thin films deposited directly on Si substrates at low temperature
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.110638
Reference8 articles.
1. Ferroelectric materials for 64 Mb and 256 Mb DRAMs
2. Preparation of epitaxial ABO3perovskite‐type oxide thin films on a (100)MgAl2O4/Si substrate
3. RF Sputtered Strontium Titanate Films
4. Oriented Growth of SrTiO3 Films on Si(100) Substrates Using In—situ Cleaning By Excited Hydrogen
5. Interface Structure and Dielectric Properties of SrTiO3 Thin Film Sputter-Deposited onto Si Substrates
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1. Effects of Pt diffusion barrier layer on the interface reaction and electric properties of PZT film/Si(111) sample;Chinese Journal of Chemistry;2010-08-27
2. Preparation of c-axis textured SrTiO3 thin films on Si(100) substrates by pulsed laser deposition process;Physica B: Condensed Matter;2010-01
3. Low-Temperature Recrystallization of Ferroelectric Lead Zirconate Titanate Thin Films on Glass Substrate Using Continuous-Wave Green Laser;Japanese Journal of Applied Physics;2009-04-20
4. Effect of crystallization on optical properties of sol-gel processed nano-sized strontium titanate (SrTiO3) thin films;The European Physical Journal Applied Physics;2009-02-17
5. Optical properties of SrTiO3 thin films deposited by radio-frequency magnetron sputtering at various substrate temperatures;Journal of Applied Physics;2006-02
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