GaAs/AlGaAs quantum‐well intermixing using shallow ion implantation and rapid thermal annealing
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.344488
Reference16 articles.
1. Laser beam heating and transformation of a GaAs‐AlAs multiple‐quantum‐well structure
2. Laser induced disordering of GaAs‐AlGaAs superlattice and incorporation of Si impurity
3. Intermixing of AlxGa1−xAs/GaAs superlattices by pulsed laser irradiation
4. Disorder of an AlAs‐GaAs superlattice by impurity diffusion
5. Impurity induced disordering of strained GaP‐GaAs1−xPx(x∼0.6) superlattices
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