1. V.G. Mokerov Institute of Ultra High Frequency Semiconductor Electronics of the Russian Academy of Sciences 1 , Moscow, Russia
2. Bauman Moscow State Technical University 2 , Moscow, Russia
3. Moscow Institute of Physics and Technology 3 , 141700 Dolgoprudny, Russia
4. Prokhorov General Physics Institute of the Russian Academy of Sciences 4 , Moscow, Russia
5. Institute of Solid State Physics of the Russian Academy of Sciences 5 , Chernogolovka, Russia
6. Research Institute of Electrical Communication, Tohoku University 6 , Sendai, Japan