Fabrication of buried channel waveguides in photosensitive glass using proton beam writing
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2198798
Reference29 articles.
1. Fabrication technologies for microsystems utilizing photoetchable glass
2. 3-D microstructuring inside photosensitive glass by femtosecond laser excitation
3. Three-dimensional micro-optical components embedded in photosensitive glass by a femtosecond laser
4. Fabrication of microstructures in photoetchable glass ceramics using excimer and femtosecond lasers
5. Formation of embedded patterns in glasses using femtosecond irradiation
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