Prevention of In evaporation and preservation of smooth surface in thermal annealing and mass transport of InP
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.105057
Reference12 articles.
1. Control of substrate degradation IN InP LPE growth with PH3 partial pressure
2. Thermal degradation of InP and its control in LPE growth
3. Prevention of InP surface decomposition in liquid phase epitaxial growth
4. Morphological Study of Thermal Decomposition of InP Surfaces
5. Preservation of InP substrates in vapor phase epitaxy: The effect of excess PH3
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