High performance metal-insulator-semiconductor-insulator-metal photodetector fabricated on a silicon-on-oxide substrate
Author:
Affiliation:
1. Electrical Engineering Department, Russel Berrie Nanotechnology Institute, Technion, Haifa 32000, Israel
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5111679
Reference46 articles.
1. Metal-Insulator-Semiconductor Photodetectors
2. High-speed Ga/sub 0.47/In/sub 0.53/As MISIM photodetectors with dielectric-assisted Schottky barriers
3. Photodetectors based on metal-tunnel insulator-semiconductor structures
4. Low-leakage-current metal–insulator–semiconductor–insulator–metal photodetector on silicon with a SiO2 barrier-enhancement layer
5. ITO/SiOx/Si optical sensor with internal gain
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