Low-debris, efficient laser-produced plasma extreme ultraviolet source by use of a regenerative liquid microjet target containing tin dioxide (SnO2) nanoparticles-Reference-Cited by-同舟云学术

Low-debris, efficient laser-produced plasma extreme ultraviolet source by use of a regenerative liquid microjet target containing tin dioxide (SnO2) nanoparticles

Published:2006-05-15 Issue:20 Volume:88 Page:201503
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Higashiguchi Takeshi,Dojyo Naoto,Hamada Masaya,Sasaki Wataru,Kubodera Shoichi

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.2206131

Reference11 articles.

1. Extreme ultraviolet lithography

2. Droplet target for low-debris laser-plasma soft X-ray generation

3. High conversion efficiency mass-limited Sn-based laser plasma source for extreme ultraviolet lithography

4. Liquid-tin-jet laser-plasma extreme ultraviolet generation

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