1. Institute of Plasma Technology, Korea Institute of Fusion Energy, 37 Dongjansan-ro, Gunsan, Jeollabuk-do 54004, Republic of Korea
2. Department of Bio-Nano System Engineering, Jeonbuk National University, 567 Baekje-daero, Deokjin-gu, Jeonju 54896, Republic of Korea
3. Department of Applied Plasma & Quantum Beam Engineering, Jeonbuk National University, 567 Baekje-daero, Deokjin-gu, Jeonju 54896, Republic of Korea