Dynamic Q-enhancement in aluminum nitride contour-mode resonators-Reference-Cited by-同舟云学术

Dynamic Q-enhancement in aluminum nitride contour-mode resonators

Published:2019-10-21 Issue:17 Volume:115 Page:173504
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Xu Changting¹²^ORCID,Kochhar Abhay²^ORCID,Piazza Gianluca²^ORCID

Affiliation:

1. QCT Stargate R&D – Santa Clara, Qualcomm Technologies, Inc., Santa Clara, California 95051, USA

2. Department of Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh, Pennsylvania 15213, USA

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.5115437

Reference50 articles.

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4. Temperature-Stable Piezoelectric MEMS Resonators Using Integrated Ovens and Simple Resistive Feedback Circuits

5. A Fully Integrated Oven Controlled Microelectromechanical Oscillator—Part II: Characterization and Measurement

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