Strain relaxation of boron nitride thin films on silicon
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.121998
Reference10 articles.
1. The synthesis, characterization, and mechanical properties of thick, ultrahard cubic boron nitride films deposited by ion-assisted sputtering
2. Synthesis of cubic boron nitride films using a helicon wave plasma and reduction of compressive stress
3. Analysis of residual stress in cubic boron nitride thin films using micromachined cantilever beams
4. Preparation of cubic boron nitride films by radio frequency magnetron sputtering and radio frequency ion plating
5. Correlation between density and structure. in boron nitride thin films by X-ray diffraction
Cited by 33 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Recent Development of Boron Nitride towards Electronic Applications;Advanced Electronic Materials;2017-04-10
2. Cubic Boron Nitride Films;Comprehensive Hard Materials;2014
3. Cubic boron nitride film residual compressive stress relaxation by post annealing;Diamond and Related Materials;2011-08
4. In Situ S-Doping of Cubic Boron Nitride Thin Films by Plasma Enhanced Chemical Vapor Deposition;Materials Science Forum;2010-01
5. Cubic boron nitride based metastable coatings and nanocomposites;Thin Solid Films;2009-12
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3