Capless anneal of ion‐implanted GaAs in controlled arsenic vapor
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.325649
Reference4 articles.
1. Annealing of Ion‐Implanted GaAs in a Controlled Atmosphere
2. Capless annealing of ion‐implanted GaAs
3. Vacancy Association of Defects in Annealed GaAs
4. Luminescence studies of a new line associated with germanium in GaAs
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