Measurement of rotational temperature using SiH(A2Δ-X2Π) emission spectrum in SiH4–H2 plasmas
Author:
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3475438
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1. Optical Emission Imaging and Modeling Investigations of Microwave-Activated SiH4/H2 and SiH4/CH4/H2 Plasmas;The Journal of Physical Chemistry A;2020-06-01
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4. Silicon nanoparticle formation depending on the discharge conditions of an atmospheric radio-frequency driven microplasma with argon/silane/hydrogen gases;Journal of Physics D: Applied Physics;2015-07-22
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