Helicon plasma sputtering system for fabrication of multilayer x‐ray mirrors
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1146458
Reference7 articles.
1. Multilayer-coated mirrors as power filters in synchrotron radiation beamlines
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4. Characterization of sliced multilayer zone plates for hard x rays (invited)
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