1. Key Laboratory of Micro/Nano and Ultra-Precision Manufacturing (Jilin Province), School of Mechatronic Engineering, Changchun University of Technology 1 , Changchun, Jilin 130012, China
2. Key Laboratory of CNC Equipment Reliability, Ministry of Education, Jilin University 2 , Changchun, Jilin 130022, China
3. School of Electronic and Information, Changchun Guanghua University 3 , Changchun, Jilin 130033, China