Surface copper contamination of as‐received float‐zone silicon wafers
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.343521
Reference19 articles.
1. Transition metals in silicon
2. Mobility of Impurity Ions in Germanium and Silicon
3. Copper Precipitate Colonies in Silicon
4. Precipitation of copper in silicon
5. Nucleation of CuSi precipitate colonies in oxygen‐rich silicon
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