140‐GHz metal‐semiconductor‐metal photodetectors on silicon‐on‐insulator substrate with a scaled active layer
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.112190
Reference7 articles.
1. Ultrafast nanoscale metal‐semiconductor‐metal photodetectors on bulk and low‐temperature grown GaAs
2. 110 GHz Si MSM photodetectors
3. Nanoscale tera-hertz metal-semiconductor-metal photodetectors
4. Fabrication of sub-50 nm finger spacing and width high-speed metal–semiconductor–metal photodetectors using high-resolution electron beam lithography and molecular beam epitaxy
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