Investigation of surface boundary conditions for continuum modeling of RF plasmas
Author:
Affiliation:
1. Department of Mechanical and Aerospace Engineering, The University of Alabama in Huntsville, Huntsville, Alabama 35899, USA
Funder
National Science Foundation
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/am-pdf/10.1063/1.5020983
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