Properties of conducting transparent oxide films produced by ion plating onto room‐temperature substrates
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.91065
Reference4 articles.
1. Interface Formation during Thin Film Deposition
2. Effect of O2pressure during deposition on properties of rf‐sputtered Sn‐doped In2O3films
3. The effect of substrate bias on the electrical and optical properties of In2O3 films grown by RF sputtering
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