Ultraprecision XY stage using a hybrid bolt-clamped Langevin-type ultrasonic linear motor for continuous motion
Author:
Affiliation:
1. School of Mechatronics, Gwangju Institute of Science and Technology, 123 Cheomdangwagi-ro, Buk-gu, Gwangju 500-712, South Korea
Funder
Ministry of Science, ICT and Future Planning (MSIP)
Ministry of Education (Ministry of Education of the Republic of Korea)
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://scitation.aip.org/deliver/fulltext/aip/journal/rsi/86/1/1.4905897.pdf?itemId=/content/aip/journal/rsi/86/1/10.1063/1.4905897&mimeType=pdf&containerItemId=content/aip/journal/rsi
Reference38 articles.
1. Air-bearing linear actuator for highly precise tracking
2. A Survey of Control Issues in Nanopositioning
3. Design, modeling, control and experiment for a 2-DOF compliant micro-motion stage
4. Construction and verification of a linear-rotary microstage with a millimeter-scale range
5. Design evaluation of a single-axis precision controlled positioning stage
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