Subcutoff microwave driven plasma ion sources for multielemental focused ion beam systems
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2943341
Reference24 articles.
1. Recent developments in micromilling using focused ion beam technology
2. Focused-ion-beam-induced deposition of superconducting nanowires
3. Focused Ion Beam Systems
4. Performance of multicusp plasma ion source for focused ion beam applications
5. Experiment combining ion-beam sputtering and quantitative ICP-OES analysis: angular distributions and total yield of titanium sputtered by 5 keV krypton ions
Cited by 30 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Electric field driven focusing and transport of plasma ion beams by micro-glass capillaries beyond the self-focusing limit;Journal of Physics D: Applied Physics;2024-07-18
2. Tailoring of microwave power density in an ECR ion source using an optimized ridge coupler;Physica Scripta;2023-06-20
3. Experimental realization of nonlinear demagnification in plasma-based charged particle optics;Plasma Research Express;2022-05-27
4. Optical band gap tailoring of muscovite mica via monolayer modification by ultra-low energy ion beam sputtering;Physica B: Condensed Matter;2021-12
5. Variable gaseous ion beams from plasmas driven by electromagnetic waves for nano-micro structuring: a tutorial and an overview of recent works and future prospects;Plasma Research Express;2020-08-03
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3