Complementary application of electron microscopy and micro-Raman spectroscopy for microstructure, stress, and bonding defect investigation of heteroepitaxial chemical vapor deposited diamond films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.366672
Reference32 articles.
1. Residual stresses and debonding of diamond films on titanium alloy substrates
2. Epitaxial nucleation, growth and characterization of highly oriented, (100)-textured diamond films on silicon
3. Characterization of diamond films by Raman spectroscopy
4. Stress measurement of CVD diamond films
5. Stress distribution in heteroepitaxial chemical vapor deposited diamond films
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