Interference method for monitoring the refractive index and the thickness of transparent films during deposition-Reference-Cited by-同舟云学术

Interference method for monitoring the refractive index and the thickness of transparent films during deposition

Published:1990-04 Issue:4 Volume:61 Page:1200-1203
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Alius H.,Schmidt R.

Publisher

AIP Publishing

Subject

Instrumentation

Link

http://aip.scitation.org/doi/pdf/10.1063/1.1141212

Reference5 articles.

1. R. Azzam and N. Bashara,Ellipsometry and Polarized Light(North-Holland, Amsterdam, 1977).

2. W. Steel,Interferometrie(University, Cambridge, 1983).

3. M. Born and E. Wolf,Principles of Optics(Pergamon, Oxford, 1987) p. 40.

4. M. Born and E. Wolf,Princphs of Optics(Pergamon, Oxford, 1987), p. 62, Eq, 60 [Eq. (1) is obtained by putting R = 1−T and doing a simple trigonometric transformation].

5. M. Born and E. Wolf,Principles of Optics(Pergamon, Oxford, 1987), p. 66.

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