Low temperature direct wafer bonding of GaAs to Si via plasma activation
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4791584
Reference18 articles.
1. Handbook of Wafer Bonding
2. Wafer Bonding
3. A Model of Low‐Temperature Wafer Bonding And Its Applications
4. Bubble-Free Wafer Bonding of GaAs and InP on Silicon in a Microcleanroom
5. Low-temperature wafer bonding: a study of void formation and influence on bonding strength
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