Temperature distributions produced in semiconductors by a scanning elliptical or circular cw laser beam
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.327420
Reference9 articles.
1. Physical and electrical properties of laser‐annealed ion‐implanted silicon
2. A study of the mechanism of cw laser annealing of arsenic‐implanted silicon
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4. Heat treating and melting material with a scanning laser or electron beam
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