High-bandwidth and flexible tracking control for precision motion with application to a piezo nanopositioner
Author:
Affiliation:
1. Hubei Key Laboratory of Waterjet Theory and New Technology, Wuhan University, Wuhan 430072, China
Funder
Shenzhen Science and Technology Program
National Natural Science Foundation of China (NSFC)
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4998303
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