Design and analysis of a novel dual-mass MEMS resonant output gyroscope
Author:
Affiliation:
1. School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China
2. Key Laboratory of Micro-Inertial Instruments and Advanced Navigation Technology, Ministry of Education, Nanjing 210096, China
Funder
Overseas Chinese Scholars and Scholars in Hong Kong and Macao
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5020176
Reference19 articles.
1. Micromachined inertial sensors
2. A vacuum packaged surface micromachined resonant accelerometer
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