Profilometry and stress analysis of suspended nanostructured thin films
Author:
Affiliation:
1. Department of Physics and Astronomy, Aarhus University, DK-8000 Aarhus C, Denmark
2. Department of Engineering, Aarhus University, DK-8000 Aarhus C, Denmark
Funder
Independent Research Fund Denmark
Danish Hydrocarbon Research and Technology Center
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
https://aip.scitation.org/doi/pdf/10.1063/5.0037406
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