Dependence of the IR reflectance LO absorption bands on the crystalline texture of AlN films
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2209205
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1. Proceedings of the Fourth Workshop on MEMS for Millimeterwave Communication;Ancey P.,2003
2. Volume manufacturing aspects of baw filters on a production cluster system
3. Improving manufacturability of aln deposition used in making bulk acoustic wave devices
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