A hard graphitelike hydrogenated amorphous carbon grown at high deposition rate (>15nm∕s)
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2938056
Reference18 articles.
1. Diamond-like amorphous carbon
2. Amorphous carbon
3. Properties of diamond-like carbon
4. Plasma beam deposited amorphous hydrogenated carbon: Improved film quality at higher growth rate
5. Fast deposition of amorphous hydrogenated carbon films using a supersonically expanding arc plasma
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